软光刻

Abstract(#br)Polydimethylsiloxane (PDMS) based microdevices have bought revolutionary change in the chemical analysis. Suitable mechanical properties of PDMS make it amenable for soft lithography and certain optical properties like transparency in Near InfraRed (NIR) make it a yet unexplored option for use as a window material in Fourier Transform InfraRed (FTIR) Spectrometers. We investigate the utility of PDMS as a transmittance cell kit in FTIR Spectrometer replacing the CaF 2 windows.

Abstract(#br)Novel titania and hafnia structures on top of silica wafer were produced using atomic layer deposition through the accessible pores created by a patterned polydimethylsiloxane (PDMS) stamp in conformal contact. Typically, the processing temperature was in the range of 125\u003cce:hsp sp=\"0.25\"/\u003e°C in order to avoid damaging the stamp and also to create an amorphous metal oxide deposit. Interestingly, the deposit formation tended to be dominated by condensation of the metal oxide precursor and water in the vicinity of the contact edges of the stamp and substrate.

Abstract(#br)In this work, we synergistically combine laser-induced forward transfer (LIFT) and replica molding for the fabrication of microlenses with control of their geometry and size independent of the material or substrate used. Our approach is based on a multistep process in which liquid microdroplets of an aqueous solution are first printed on a substrate by LIFT. Following a freezing step, the microdroplets are used as a master to fabricate a polydimethylsiloxane (PDMS) mold.

Abstract(#br)Fabrication of microscale surface structures is a promising method for controlling the surface wettability of materials. Herein, the micropillar and microhole arrays of polydimethylsiloxane (PDMS) were fabricated through a soft lithography process, and the modified wettability was investigated. Using PDMS samples with different degrees of crosslinking, a PDMS–PDMS pattern transfer was achieved, and the microhole and micropillar arrays were obtained from a single master substrate.

摘要 多孔膜广泛应用于细胞器分选、渗透细胞生长基质、等离子体过滤等微纳米流体领域。由于薄膜基材的机械稳定性差，传统的硅制备方法不适用于微孔膜。其他的离子轨道刻蚀技术仅限于制备孔径不均匀的随机分布、随机取向的孔隙。 本课题采用旋铸和软光刻相结合的方法，利用质子束流( PBW )技术制备了高透过率微孔膜。该方法利用聚焦2 MeV质子，在硅片上涂复SU-8层，由少µm大小的六边形高密度柱组成的光刻图形。开发完成后，采用聚对二甲苯( Parylene ) -C缓释剂薄膜和聚二甲基硅氧烷( PDMS )旋涂的方法对柱体进行均匀涂复。为了便于拆模，开发了一种基于激光切割密封圈的特殊工艺。该方法成功地实现了20μm厚PDMS膜从模具中分离出高密度微孔，无破裂和损伤。

Abstract(#br)High density gold nanostructures are grown by thermal deposition on flat and nanostructured polymeric templates by exploiting the extraordinarily low wettability of Au on polydimethylsiloxane (PDMS). Undulated PDMS templates are fabricated by replica molding process (REM) on “masters” prepared by defocused Ion Beam Sputtering (IBS). Closely packed and laterally disconnected Au nanostructures are grown at grazing incidence on the PDMS replica templates exploiting the shadowing instability.

A novel frequency reconfigurable microstrip patch antenna is proposed, which uses liquid metal alloy and highly extensible elastomer as a radiant patch and a dielectric substrate, respectively. The liquid metal used is eutectic gallium-indium alloy(EGaIn), consisting of 75% gallium and 25% indium. The elastomer used is polymethylsiloxane(PDMS), and the tensile quantity of PDMS under three ratios is measured by experiment. When the mass ratio is 10:1, PDMS has lower viscosity and better stretchability.

This paper describes a microfluidic device for observation of cancer cell invasion induced by chemotaxis. The developed device has two main-channels, the channel filled with cell suspension and the channel filled with solution containing chemotactic factor. These channels are connected via tapered orifice structures to capture multiple cancer cells in it to form cell clusters. Observation of cell invasions affected by cell adhesions is possible with this device. The devices were fabricated by using three-dimensional lithography and PDMS(polydimethylsiloxane) molding.

We studied 3D dielectrophoretic (DEP) effects induced by dielectric pillar arrays fabricated by soft lithography. Polydimethylsiloxane (PDMS) was casted onto a PMMA mold with arrays of high-aspect-ratio holes micromachined by proton beam writing (PBW), which is a novel direct-write lithographic technique using a scanning proton beam. Arrays of PDMS pillars with diameter of ∼3 µm and a height of ∼15 µm, were fabricated using the soft lithography.

Abstract\n\t\t\t\t\n\t\t\t\t\tA flow-through PCR device with integrated chromium resistive heaters was developed. The PCR device was composed of a polydimethylsiloxane flow channel chip fabricated using soft lithography and a glass heating chip produced by standard photolithography. PDMS bonding layers were used to assemble the device instead of oxygen plasma treatment. The formation of air bubbles within the device was suppressed by treating the flow channel with 20% (v/v) Tween 20.