微柱阵列

Abstract(#br)Fabrication of microscale surface structures is a promising method for controlling the surface wettability of materials. Herein, the micropillar and microhole arrays of polydimethylsiloxane (PDMS) were fabricated through a soft lithography process, and the modified wettability was investigated. Using PDMS samples with different degrees of crosslinking, a PDMS–PDMS pattern transfer was achieved, and the microhole and micropillar arrays were obtained from a single master substrate.

以非光刻硅纳米线( SiNW )阵列为模板，成功制备了碳纳米管/聚二甲基硅氧烷复合微柱( CNT / PDMS MP )阵列，用于摩擦电纳米发电机( TENG )的性能增强。在SiNW阵列上浇注CNT / PDMS复合材料，剥离得到CNT / PDMS MP阵列。CNT / PDMS复合材料的表面拓扑结构直接取决于SiNW阵列的形貌，可以通过典型的金属辅助化学刻蚀工艺的刻蚀时间来改变。当SiNW的形貌得到优化，长度约为10 mm时，微图形化CNT / PDMS复合材料大多被描绘成SiNW阵列模板图案。其次，将CNT / PDMS MP阵列作为摩擦电纳米发电机( TENGs )的摩擦电层，其最大输出电压为22.84 ± 0.85 V，相比于平面PDMS基TENGs，其电输出提高了约18倍；CNT / PDMS MP阵列对TENGs性能的提升主要归因于：( 1 ) CNT复合材料增强了静电感应，提高了介电常数；( 2 )非刻划图案和CNT复合材料表面织构增强了电气化。