PDMS

The first high-resolution transmission electron microscopy (TEM) cross-section images of flexible electrodes fabricated by gold ion implantation at 5\n\t\t\t\t\t\tkeV into polydimethylsiloxane (PDMS) are presented. A TEM sample preparation method based on cryoultramicrotomy, adapted for extremely low-modulus (1\n\t\t\t\t\t\tMPa) elastomers, was developed, allowing the gold nanoparticles in a PDMS matrix to be imaged. The cluster size, size distribution and implantation depth of 50\n\t\t\t\t\t\tnm were determined from the images and used to calculate the Young’s modulus of the implanted layer.

Abstract\n\t\t\t\t\n\t\t\t\t\tThis study presents reports on the fabrication and testing of micro-nozzle/diffuser with curved profile boundary. In this paper, different polymers are used for the fabrication of micro-nozzle/diffuser, SU-8 negative bone photo-resist is introduced for the molding structure, and polydimethylsiloxane (PDMS) is used for the structure of nozzle/diffuser.

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system.

In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ÅTi and 1000 Å Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 ㎛.

In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ÅTi and 1000 Å Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 ㎛.

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system.

Disposable Microchip-Based Electrochemical Detector Using Polydimethylsiloxane Channel and Indium Tin Oxide ElectrodeMicrochip;Capillary Electrophoresis;PDMS;ITO;Electrochemical Detection;We have developed a microsystem with a capillary electrophoresis (CE) and an electrochemical detector (ECD). The microfabricated CE-ECD systems are adequate for a disposable type and the characteristics are optimized for an application to the electrochemical detection. The system was realized with polydimethylsiloxane (PDMS)-glass chip and indium tin oxide electrode.

Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Micropumpmicropump;thermopneumatic- actuation;PDMS;ITOheater;diffuser;A thermopneumatic-actuated polydimethylsiloxane (PDMS) micropump has been fabricated and their properties are characterized. The diffusers are used as a flow-rectifying element instead of passive check valves. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using PDMS and indium tin oxide (ITO) glass.

Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Microvalvemicrovalve;thermopneumatic-actuation;PDMS;ITO heater;membrane;A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate.

Piezoelectric-Actuated Polydimethylsiloxane(PDMS) Micropump with Diffusersmicropump;PDMS;piezoelectric disc;diffuser;deflection;flow rate;The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated.