ITOheater

Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Micropumpmicropump;thermopneumatic- actuation;PDMS;ITOheater;diffuser;A thermopneumatic-actuated polydimethylsiloxane (PDMS) micropump has been fabricated and their properties are characterized. The diffusers are used as a flow-rectifying element instead of passive check valves. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using PDMS and indium tin oxide (ITO) glass.