压电盘

Piezoelectric-Actuated Polydimethylsiloxane(PDMS) Micropump with Diffusersmicropump;PDMS;piezoelectric disc;diffuser;deflection;flow rate;The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated.