Fabrication and investigation of PDMS micro-diffuser/nozzle
Abstract\n\t\t\t\t\n\t\t\t\t\tThis study presents reports on the fabrication and testing of micro-nozzle/diffuser with curved profile boundary. In this paper, different polymers are used for the fabrication of micro-nozzle/diffuser, SU-8 negative bone photo-resist is introduced for the molding structure, and polydimethylsiloxane (PDMS) is used for the structure of nozzle/diffuser.