氧等离子体

Abstract(#br)Direct chemical bonding of biomolecules to the surface of chemically inert polymers such as polydimethylsiloxane (PDMS) is not easily achieved. Therefore, pre-activation of such materials, followed by attachment of the biomolecule is necessary.(#br)This paper describes a procedure to functionalize a PDMS surface by oxygen-based plasma followed by the adhesion of collagen type I for the preparation of adhesive-free bilayer composite intended as skin substitute.

In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ÅTi and 1000 Å Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 ㎛.

In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ÅTi and 1000 Å Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 ㎛.