Micropurnp

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system.

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system.