Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Microvalve
Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Microvalvemicrovalve;thermopneumatic-actuation;PDMS;ITO heater;membrane;A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate.