干转移法

Improvement of PDMS graphene transfer method through surface modification of target substrate

ty10086 提交于 周四, 08/26/2021 - 12:51
Improvement of PDMS graphene transfer method through surface modification of target substrategraphene;dry transfer method;surface modification;polydimethylsiloxane;surface energy;In this paper, we study the dry transfer technology utilizing PDMS (Polydimethylsiloxane) stamp of a large single-layer graphene grown on Cu-foil as catalytic metal by using Chemical Vapor Deposition (CVD). By changing the surface property of the target substrate through $UV/O_3$ treatment, we can transfer the graphene on the target substrate while minimizing mechanical damages of graphene layer.