Experimental Study on a Polydimethylsiloxane (PDMS) Valveless Micropump Actuated by a Laser-induced Shock Wave
This paper proposes a novel micropump driving mode, called the laser-induced shock wave, which has the advantages of remote control, high energy utilization and wireless energy supply and no electromagnetic interference. Given this new driving mode, a new manufacturing method of valveless micropump is presented that uses the material polydimethylsiloxane (PDMS) and microelectromechanical systems (MEMS) technology. This method carries the merits of high reliability, high efficiency and high success ratio.