压敏膜

In this paper, an optical pressure-sensitive membrane based on plasmon resonance absorption has been designed, fabricated, and demonstrated. The membrane utilizes plasmon resonance on a gold island film embedded in a polydimethylsiloxane (PDMS) layers, and the shift of the resonant wavelength was used as an indicator of pressure-induced strain of the membrane. The membrane with total thickness of 100 µm were prepared with spin-coating of PDMS and vacuum evaporation of gold island film with the nominal thickness of 10 nm.

本文设计、制备了一种基于等离子体共振吸收的光学压力敏感膜，并对其进行了表征。该膜利用聚二甲基硅氧烷( PDMS )层中的金岛膜上的等离激元共振，以共振波长的漂移作为膜的压力应变的指标。采用PDMS旋涂和真空蒸镀标称厚度为10 nm的金岛膜制备了总厚度为100 µ m的膜。通过吸光度谱的测量，验证了所制备膜的压敏性，当压力达到35 k Pa时，灵敏度达到最大值0.35 nm / k Pa。通过电磁仿真和膜拉伸试验的对比，分析了引起压力敏感性的等离子体共振模式。通过拉伸试验，得到了平行和垂直偏振方向的共振波长红移，灵敏度分别为0.372和0.134 nm / %。从电磁仿真结果来看，这些红移可以归因于金岛薄膜的带隙模式和形变模式共振。