Hybrid microfluidic cartridge formed by irreversible bonding of SU-8 and PDMS for multi-layer flow applications
Abstract(#br)SU-8 and polydimethylsiloxane (PDMS) are both transparent materials with properties very convenient for rapid prototyping of microfluidic systems. However, previous efforts of combining these two materials failed due to poor adhesion between them. Herein, we introduce a promising low-temperature technique (\u003c 100 °C) to irreversibly bond two or more structured layers of SU-8 and PDMS to create hybrid stacks. This offers new possibilities in design and fabrication of enclosed three-dimensional microstructures and microchannels with simple soft-lithography techniques.