UV-纳米压印

UV-nanoimprinting lithography of Bragg Gratings on hybrid sol-gel based channel waveguides

ty10086 提交于 周四, 08/26/2021 - 13:45
Abstract(#br)We report on the fabrication in a single step of a channel grating loaded waveguide on Titanium based hybrid sol-gel material.(#br)This result has been accomplished by the merging of several lithographic techniques, namely conventional, laser interference, and soft lithography.(#br)Conventional lithographic processes have been employed for fabricating channel waveguides on a previously holographically written planar photopolymerizable sol-gel film.