Microwrinkles by deposition of aluminum onto polydimethylsiloxane
Abstract(#br)We observed the variation in the size of microwrinkles according to the number of unit processing cycles, which consist of polydimethyl siloxane (PDMS) casting followed by the deposition of Al. As the number of processing cycles increases, the width of the microwrinkles narrows and their height increases. After five processing cycles were completed, the width of the microwrinkles stood at 1.7–3.7\u003cce:hsp sp=\"0.25\"/\u003eμm.