MEA

Abstract(#br)A platform for the batch fabrication of pneumatically actuated Stretchable Micro-Electrode Arrays (SMEAs) by using state-of-the-art micro-fabrication techniques and materials is demonstrated. The proposed fabrication process avoids the problems normally associated with processing of thin film structures on polydimethylsiloxane (PDMS), by first fabricating the electrodes and electrical interconnects on the silicon wafer using fine-pitched stepper lithography, and afterwards transferring the structures to the elastomer.