In-situ Surface Modification of Microfluidic Channels by Integrated Plasma Source
Abstract(#br)In-situ modification of originally hydrophobic polymer surfaces by local plasma enhanced oxidation and its application in electrically controlled fluid capillary systems are demonstrated. A microfabricated coplanar dielectric barrier discharge (DBD) plasma source was developed [1,2], integrated and applied to modify in-situ the surface properties of polydimethylsiloxane (PDMS) capillary channels.