超薄膜

Abstract(#br)The paper describes a reliable technique to prepare PDMS membrane used to determine the permeability to CO 2 and He. SEM controls morphology of surface membrane and SEM/FIB measures the membrane thickness. The data show that permeability becomes thickness dependent below some tens of micrometers. The Islam׳s model, based on the non-equilibrium sorption–desorption process at the interface, fits quite well with the experimental data. The comparison shows that flux models based on interface reaction could apply to describe quantitatively the thickness-dependence of the permeability.