Preparation of Nonspherical Monodisperse Polydimethylsiloxane Microparticles for Self-assembly Fabrication of Periodic Structures
Nonspherical monodisperse polydimethylsiloxane (PDMS) microparticles were fabricated by lithography and ultraviolet ozone (UVO) treatment for self-assembly of periodic structures. PDMS solution was poured into photoresist molds on glass substrates, whereupon it was cured at 80°C. After irradiating ultraviolet to the surface of the PDMS, remaining thin PDMS films on the molds were eliminated using ultrasonic waves.