通孔电化学微加工

Electrochemical micromachining of micro-dimple arrays using a polydimethylsiloxane (PDMS) mask

ty10086 提交于 周四, 08/26/2021 - 12:59
Graphical abstractSEM images of the micro-dimple arrays generated with PDMS mask. [Display omitted] ;Highlights•It is difficult to generate micro-dimple arrays with PDMS mask in hydrostatic mode.•Micro-dimple arrays with poor uniformity were obtained in lateral flow mode.•The forward flow mode was modified with multi-slits structure cathode.•With the modified mode, micro-dimple arrays could be generated uniformly.;AbstractMicro-dimple arrays on the surfaces of engineering parts play an important role in the behaviour of these parts.