An Electromagnetic Microvalve for Pneumatic Control of Microfluidic Systems
An electromagnetic microvalve for pneumatic control of microfluidic devices has been designed, fabricated, and tested. The microvalve is composed of two parts: a miniature electromagnetic actuator and a valve body. The electromagnetic actuator consists mainly of a thin polydimethylsiloxane (PDMS)–based elastomer, which acts as the valve diaphragm. The diaphragm, used as a solid hydraulic medium, converts the large contact area of a valve core into a small contact area of valve head while maintaining a large stroking force.