Fabrication and characterization of patterned carbon nanotube flow sensor cell
Abstract:Patterned flow sensor cell consisting of single-walled carbon nanotubes (SWCNTs) network and polydimethylsiloxane (PDMS) are fabricated, based on the process of vacuum filtration, photolithography, and plasma etching. The sensor cell is a composite thin film and packaged to form a flow sensor, and then tested in different flow rates with different liquids, such as deionized (DI) water and NaCl solution. The induced-voltage increases with increasing flowing velocity and liquid concentration.