法布里-珀罗

To effectively control the critical thickness of a polydimethylsiloxane (PDMS) film and enhance the sensitivity characteristics of the fiber pressure sensor, we propose a new method to optimize the thickness of the PDMS film in a fiber tube. It is characterized by analyzing the relationship between the diffusion rate of the PDMS and its viscosity, and using an oven to solidify the PDMS to a certain extent to accurately control the diffusion rate and diffusion length of the PDMS in the fiber tube.

本工作提出了一种采用非特异性聚合物作为传感材料同时传感多个气体的全光片上集成气体传感器阵列。个别传感器垂直刻蚀成硅片。它们是由两个布拉格反射镜组成的法布里-珀罗腔，通过聚乙二醇( PEG )、SU-8和聚二甲基硅氧烷( PDMS )等不同聚合物的功能化，实现了异丙醇( IPA )、水、戊酸和丁醇等多种气体混合物的多气体检测。采用线性模型，我们报告混合物中戊酸的检出限低至每百万分之8.1份( ppm )。