透明基底上质子束写入微透镜阵列制备PDMS曲面微结构

Abstract(#br)Polydimethylsiloxane (PDMS), a type of silicone rubber, has excellent material properties such as flexibility, optical transparency and biocompatibility. Therefore, it can offer possible applications in the field of microfluidics as flexible micro-optical components, when they can be formed on transparent materials such as silica glass. We performed proton beam writing (PBW) (with 1.0\u003cce:hsp sp=\"0.25\"/\u003eMeV beam) on PDMS microstructures with curved surface on silica glass. We found that 13-μm thick PDMS films on silica glass are sensitive only for proton fluences above 600\u003cce:hsp sp=\"0.25\"/\u003enC/mm 2 in contrast with the sensitivity of 4.0\u003cce:hsp sp=\"0.25\"/\u003enC/mm 2 when using a silicon substrate. Based on the hypothesis that the effective sensitivity was lower due to the electric charging of silica glass surface during PBW, we coated the silica glass surface by Au sputtering. As a result, we were able to observe the formation of PDMS on the Au-coated silica glass at a much lower fluence of 2.0\u003cce:hsp sp=\"0.25\"/\u003enC/mm 2 . Arrays of curved PDMS structures with a height of 13\u003cce:hsp sp=\"0.25\"/\u003eμm and diameter of 40\u003cce:hsp sp=\"0.25\"/\u003eμm have been fabricated on a semi-transparent Au-coated silica glass.