基于AFM的软光刻三维纳米模板的纳米加工及质量检验

Soft lithography is one of the most promising nanofabrication technologies for scalable nanomanufacturing. It uses flexible molds or stamps to fabricate extremely high-resolution nanopatterns in a low cost and rapid fashion on both flat and curved surfaces. Although two-dimensional soft lithography has been widely investigated and applied for some applications, there is a lack of quantitative research on using nanometer scale 3D patterns fabricated by atomic force microscope (AFM) for 3D soft lithography. In this paper, we demonstrated the effectiveness of ultrasonic vibration assisted AFM-based nanomachining in fabricating 3D master nanotemplates for 3D soft lithography. We successfully applied Polydimethylsiloxane (PDMS) daughter molds, casted from a nanometer scale 3D master template, using a soft lithography technique solvent-assisted micromolding. In addition, we investigated the quality and reusability of the master nanotemplates, and the quality of the PDMS patterns by quantifying the volume differences using an automatic imaging registration algorithm. Results show that there are zero or little PDMS residuals in the polymethyl methacrylate (PMMA) master nanotemplate with a simple contour for the first and second daughter mold casting, but 7% residuals for the third casting. And a more complex master nanotemplate shows slightly higher residual levels.